Toru Kakuda

3 Patents

• US125059892025

  Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device

  Kokusai Electric Corporation

  0 cites
• US120875982024

  Substrate Processing Apparatus

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US119487782024

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Baffle Structure of the Substrate Processing Apparatus

  KOKUSAI ELECTRIC CORPORATION

  0 cites