Patents/Inventors

Toru Kagaya

ToyamaJP3 patents

3 Patents

US125037682025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, Method of Processing Substrate, and Gas Injector
KOKUSAI ELECTRIC CORPORATION
0 cites
USD10206682024
Gas Injector for Substrate Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites
USD09927622023
Protector for Maintenance on Semiconductor Manufacturing Equipments
KOKUSAI ELECTRIC CORPORATION
0 cites