Patents/Inventors

Toru Hirata

TokyoJP3 patents

4 Patents

US124969072025
Failure Sign Determination Device, Onboard Device, and Failure Sign Determination Method
MITSUBISHI ELECTRIC CORPORATION
0 cites
US124590092025
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US122495332025
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119553652024
Substrate Processing Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites