Patents/Inventors

Tomoyuki Shinohara

KyotoJP6 patents

7 Patents

US125936542026
Substrate Alignment Device, Substrate Processing Apparatus, Substrate Alignment Method and Substrate Processing Method
SCREEN HOLDINGS CO., Ltd.
0 cites
US124854612025
Substrate Cleaning Device, Substrate Cleaning System, Substrate Processing System, Substrate Cleaning Method and Substrate Processing Method
SCREEN HOLDINGS CO., Ltd.
0 cites
US124630632025
Substrate Cleaning Device
SCREEN HOLDINGS CO., Ltd.
0 cites
US122517352025
Substrate Cleaning Device and Substrate Cleaning Method
SCREEN Holdings Co., Ltd.
0 cites
US120365832024
Substrate Cleaning Device and Substrate Cleaning Method
SCREEN HOLDINGS CO., Ltd.
0 cites
US120366622024
Substrate Processing Apparatus and Substrate Processing Method
SCREEN HOLDINGS CO., Ltd.
0 cites
US120172572024
Substrate Cleaning Device and Substrate Cleaning Method
SCREEN HOLDINGS CO., Ltd.
0 cites