Patents/Inventors

Tomoya Onitsuka

KumamotoJP4 patents

3 Patents

US125911802026
Substrate Processing Apparatus and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US125720772026
Heat Treatment Apparatus and Heat Treatment Method
Tokyo Electron Limited
0 cites
US122986682025
Heat Treatment Apparatus and Heat Treatment Method
Tokyo Electron Limited
0 cites