Patents/Inventors

Tomoya Mizutani

TokyoJP1 patent

2 Patents

US116623732023
Substrate Storage Container Management System, Load Port, and Substrate Storage Container Management Method
Sinfonia Technology Co., Ltd.
0 cites
US116580472023
Exhaust Nozzle Unit, Load Port, and EFEM
Sinfonia Technology Co., Ltd.
0 cites