Patents/Inventors

Tomotake Minemura

NaganoJP3 patents

4 Patents

US121577022024
Ceramic Substrate and Electrostatic Chuck
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US119523162024
Composite Green Sheet and Ceramic Member
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US117354582023
Ceramic Mixture Paste, Porous Body, Electrostatic Chuck, and Substrate Fixing Device
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US116580152023
Ceramic Structure, Electrostatic Chuck and Substrate Fixing Device
Shinko Electric Industries Co., Ltd.
0 cites