Patents/Inventors

Tomotaka Tsuchimura

Haibara-gunJP2 patents

4 Patents

US119538292024
Actinic Ray-sensitive or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, and Method for Manufacturing Electronic Device
FUJIFILM Corporation
0 cites
US116565482023
Actinic Ray-sensitive or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, Mask Blank with Resist Film, Method for Producing Photomask, and Method for Manufacturing Electronic Device
FUJIFILM Corporation
0 cites
US116044122023
Actinic Ray-sensitive or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, and Method for Manufacturing Electronic Device
FUJIFILM Corporation
0 cites
US116044142023
Photosensitive Composition for EUV Light, Pattern Forming Method, and Method for Manufacturing Electronic Device
FUJIFILM Corporation
0 cites