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Inventors
Tomoo Ota
Kyoto
JP
1 patent
2 Patents
US12117009
2024
Vacuum Pump Including Magnetic Bearing and Motor Bearing Operable as Radial Magnetic Bearing, Motor, and Thrust Magnetic Bearing
SHIMADZU CORPORATION
0 cites
US12009726
2024
Vacuum Pump and Magnetic-bearing-integrated Motor
SHIMADZU CORPORATION
0 cites