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Inventors
Tomomi Watanabe
Joetsu
JP
8 patents
8 Patents
US12585186
2026
Photoacid Generator, Chemically Amplified Resist Composition, and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US12189292
2025
Negative Resist Composition and Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US12072628
2024
Resist Composition and Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US12001139
2024
Resist Composition and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US11822245
2023
Resist Composition and Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US11720019
2023
Resist Composition and Pattern Forming Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US11635685
2023
Resist Composition and Patterning Process
Shin-etsu Chemical Co., Ltd.
0 cites
US11624313
2023
Engine with Combustion Chamber
Mazda Motor Corporation
0 cites