Tomoko Owada

8 Patents

• US120681892024

  Elastic Membrane, Substrate Holding Device, and Polishing Apparatus

  EBARA CORPORATION

  0 cites
• US119581632024

  Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, and Method for Replacing Elastic Membrane

  EBARA CORPORATION

  0 cites
• USD10218322024

  Elastic Membrane

  EBARA CORPORATION

  0 cites
• US117453062023

  Polishing Apparatus and Method of Controlling Inclination of Stationary Ring

  EBARA CORPORATION

  0 cites
• US117312352023

  Polishing Apparatus and Polishing Method

  EBARA CORPORATION

  0 cites
• USD09890122023

  Elastic Membrane

  EBARA CORPORATION

  0 cites
• US116545242023

  Method of Detecting Abnormality of a Roller Which Transmits a Local Load to a Retainer Ring, and Polishing Apparatus

  EBARA CORPORATION

  0 cites
• USD09819692023

  Elastic Membrane for Semiconductor Wafer Polishing Apparatus

  EBARA CORPORATION

  0 cites