Patents/Inventors

Tomokazu Taki

TochigiJP2 patents

3 Patents

US120238502024
Position Detection Apparatus, Imprint Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US119340982024
Detection Apparatus, Lithography Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US118290832023
Detection Apparatus, Lithography Apparatus, Article Manufacturing Method, and Detection Method
CANON KABUSHIKI KAISHA
0 cites