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Inventors
Tomohisa Mizoguchi
Ichinomiya
JP
3 patents
3 Patents
US12506028
2025
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites
US12354900
2025
Ceramic Material Having High Resistivity and High Corrosion Resistance, and Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites
US12150219
2024
Ceramic Heater and Manufacturing Method for the Same
NGK INSULATORS, Ltd.
0 cites