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Inventors
Tomohiro Masukawa
Ichihara
JP
1 patent
2 Patents
US11971660
2024
Cross-linked Polymer for Resist
Maruzen Petrochemical Co., Ltd.
0 cites
US11725078
2023
Method for Producing Acid-decomposable Polymer
Maruzen Petrochemical Co., Ltd.
0 cites