Patents/Inventors

Tomohiro Hara

Handa-CityJP7 patents

5 Patents

US125989502026
Electrostatic Chuck Heater and Film Deposition Apparatus
NGK INSULATORS, Ltd.
0 cites
US125735982026
Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites
US124529632025
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US123984652025
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US121701902024
Wafer Support Table and RF Rod
NGK INSULATORS, Ltd.
0 cites