Patents/Inventors

Tomohiko Niizeki

TokyoJP5 patents

5 Patents

US126092872026
Method for Etching Film and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125371712026
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121129542024
Etching Method, Substrate Processing Apparatus, and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US119223072024
Learning Device, Inference Device, and Learned Model
Tokyo Electron Limited
0 cites
US116370032023
Method for Etching Film and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites