Patents/Inventors

Tomoatsu Ishibashi

TokyoJP9 patents

9 Patents

US124855162025
Substrate Cleaning Apparatus, Polishing Apparatus, Buffing Apparatus, Substrate Cleaning Method, Substrate Processing Apparatus, and Machine Learning Apparatus
EBARA CORPORATION
0 cites
US123946392025
Substrate Drying Device and Substrate Drying Method
EBARA CORPORATION
0 cites
US120338472024
Cleaning Module, Substrate Processing Apparatus Including Cleaning Module, and Cleaning Method
EBARA CORPORATION
0 cites
US118374772023
Washing Device and Washing Method
EBARA CORPORATION
0 cites
US118173112023
Substrate Cleaning Method and Substrate Cleaning Apparatus
EBARA CORPORATION
0 cites
US116768272023
Substrate Cleaning Apparatus, Substrate Cleaning Method, Substrate Processing Apparatus, and Substrate Drying Apparatus
EBARA CORPORATION
0 cites
US116606432023
Substrate Cleaning Device and Substrate Cleaning Method
EBARA CORPORATION
0 cites
US116427042023
Roll-type Processing Member, Pencil-type Processing Member, and Substrate Processing Apparatus Including Any One of These
EBARA CORPORATION
0 cites
US116262992023
Cover for Swing Member of Substrate Processing Apparatus, Swing Member of Substrate Processing Apparatus, and Substrate Processing Apparatus
EBARA CORPORATION
0 cites