Tomihiro Amano

5 Patents

• US125059892025

  Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device

  Kokusai Electric Corporation

  0 cites
• US120917512024

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US119487782024

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Baffle Structure of the Substrate Processing Apparatus

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US119423332024

  Method of Manufacturing Semiconductor Device, Cleaning Method, and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US115748152023

  Method of Manufacturing Semiconductor Device

  Kokusai Electric Corporation

  0 cites