Patents/Inventors

Tom E. Blomberg

VantaaFI11 patents

13 Patents

US123593152025
Deposition of Oxides and Nitrides
ASM IP Holding B.V.
0 cites
US123200122025
Thermal Atomic Layer Etching Processes
ASM IP Holding B.V.
0 cites
US123126962025
Thermal Atomic Layer Etching Processes
ASM IP Holding B.V.
0 cites
US122411562025
Combination CVD/ALD Method, Source and Pulse Profile Modification
ASM IP Holding B.V.
0 cites
US122371822025
Showerhead Device for Semiconductor Processing System
ASM IP Holding B.V.
0 cites
US120946862024
Atomic Layer Etching Processes
ASM IP Holding B.V.
0 cites
US119569772024
Atomic Layer Deposition of III-V Compounds to Form V-NAND Devices
ASM IP Holding B.V.
0 cites
US119488132024
Showerhead Device for Semiconductor Processing System
ASM IP Holding B.V.
0 cites
US118239762023
Fluorine-containing Conductive Films
ASM IP Holding, B.V.
0 cites
US117394272023
Thermal Atomic Layer Etching Processes
ASM IP HOLDING B.V.
0 cites
US117394282023
Thermal Atomic Layer Etching Processes
ASM IP HOLDING B.V.
0 cites
US116408992023
Atomic Layer Etching Processes
ASM IP HOLDING B.V.
0 cites
US115491772023
Process for Passivating Dielectric Films
ASM INTERNATIONAL, N.V.
0 cites