Patents/Inventors

Tom Blomberg

VantaaFI5 patents

6 Patents

US123548722025
Method for Forming Doped Metal Oxide Films on a Substrate by Cyclical Deposition and Related Semiconductor Device Structures
ASM IP Holding B.V.
0 cites
US122472882025
Substrate Processing Apparatus and Method
Picosun Oy
0 cites
US121462182024
Precursor Container
Picosun Oy
0 cites
US121486092024
Silicon Oxide Deposition Method
ASM IP Holding B.V.
0 cites
US118735582024
Precursor Container
Picosun Oy
0 cites
US116580302023
Method for Forming Doped Metal Oxide Films on a Substrate by Cyclical Deposition and Related Semiconductor Device Structures
ASM IP Holding B.V.
0 cites