Tom A. Kamp

5 Patents

• US126092832026

  Control of Pulsing Frequencies and Duty Cycles of Parameters of RF Signals

  Lam Research Corporation

  0 cites
• US124943452025

  Pulsing RF Coils of a Plasma Chamber in Reverse Synchronization

  Lam Research Corporation

  0 cites
• US122372032025

  System, Method, and User Interface for Edge Ring Wear Compensation

  Lam Research Corporation

  0 cites
• US120875612024

  Vacuum Pump Protection Against Deposition Byproduct Buildup

  Lam Research Corporation

  0 cites
• US117106232023

  Vacuum Pump Protection Against Deposition Byproduct Buildup

  Lam Research Corporation

  0 cites