Patents/Inventors

Tolga Ergin

Bietigheim-BissingenDE2 patents

3 Patents

US121710542024
EUV Light Source with a Beam Positioning Device
TRUMPF Lasersystems For Semiconductor Manufacturing SE
0 cites
US118356992023
Focusing Device and EUV Radiation Generating Device Having Same
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GmbH
0 cites
US116752022023
Reflective Optical Element, Beam Guiding Device and Euv-beam Generating Device
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GmbH
0 cites