Patents/Inventors

Tokunobu Akao

ToyamaJP5 patents

4 Patents

US125043322025
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
US120501382024
Substrate Processing Apparatus, and Thermocouple
KOKUSAI ELECTRIC CORPORATION
0 cites
US119063672024
Substrate Temperature Sensor, Substrate Retainer and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
USD09761292023
Temperature Sensor
KOKUSAI ELECTRIC CORPORATION
0 cites