Todd R. Downey

3 Patents

• US125299632026

  Fast Uniformity Drift Correction

  ASML Holding N.V.

  0 cites
• US123395832025

  Optimization Using a Non-uniform Illumination Intensity Profile

  ASML NETHERLANDS B.V.

  0 cites
• US116565552023

  Lithographic Apparatus and Illumination Uniformity Correction System

  ASML NETHERLANDS B V

  0 cites