4 Patents
- US124287202025Method for Producing Layers with Improved Uniformity in Coating Systems with Horizontally Rotating Substrate Guiding
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v.
0 cites - US124215922025Device and Method for Coating Substrates Having Planar or Shaped Surfaces by Means of Magnetron Sputtering
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v.
0 cites - US122586612025Device and Method for Producing Layers with Improved Uniformity in Coating Systems with Horizontally Rotating Substrate and Additional Plasma Sources
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v.
0 cites - US122179472025Method and Device for Producing Uniform Films on Moving Substrates and Films Produced in This Way
Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v.
0 cites