Patents/Inventors

Ting-ya Cheng

TaipeiTW4 patents

5 Patents

US123325712025
Target Control in Extreme Ultraviolet Lithography Systems Using Aberration of Reflection Image
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121333192024
Apparatus and Method for Generating Extreme Ultraviolet Radiation
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121144122024
Shock Wave Visualization for Extreme Ultraviolet Plasma Optimization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118605442024
Target Control in Extreme Ultraviolet Lithography Systems Using Aberration of Reflection Image
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118006262023
Shock Wave Visualization for Extreme Ultraviolet Plasma Optimization
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites