14 Patents
- US125526642026Self-aligned Acoustic Hole Formation in Piezoelectrical MEMS Microphone
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123587852025Comb Electrode Release Process for MEMS Structure
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US122725852025Wafer Chuck Structure with Holes in Upper Surface to Improve Temperature Uniformity
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US122384782025Top Notch Slit Profile for MEMS Device
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US122133832025Fully-wet via Patterning Method in Piezoelectric Sensor
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US121800642024Curved Cantilever Design to Reduce Stress in MEMS Actuator
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US121334672024Microelectromechanical System with Piezoelectric Film and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120435372024Method of Manufacturing a Microelectromechanical Systems (MEMS) Device
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US120062082024Micro-electromechanical System Device Including a Precision Proof Mass Element and Methods for Forming the Same
Taiwan Semiconductor Manufacturing Company Limited
0 cites - US119325312024Curved Cantilever Design to Reduce Stress in MEMS Actuator
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US116932952023Auto-focusing Device and Method of Fabricating the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116613372023Comb Electrode Release Process for MEMS Structure
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US116343202023Micro-electromechanical System Device Including a Precision Proof Mass Element and Methods for Forming the Same
Taiwan Semiconductor Manufacturing Company Limited
0 cites - US115577102023Fully-wet via Patterning Method in Piezoelectric Sensor
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites