Ting-hsun Chang

7 Patents

• US123590902025

  Composition and Method for Polishing and Integrated Circuit

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US121722632024

  Chemical Mechanical Planarization Tool

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US121319442024

  Slurry Composition, Semiconductor Structure and Method for Forming the Same

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US120026842024

  Methods for Chemical Mechanical Polishing and Forming Interconnect Structure

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US117722282023

  Chemical Mechanical Polishing Apparatus Including a Multi-zone Platen

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

  0 cites
• US116794692023

  Chemical Mechanical Planarization Tool

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

  0 cites
• US116580652023

  Chemical Mechanical Polishing Slurry Composition, Method for Chemical Mechanical Polishing and Method for Forming Connecting Structure

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites