13 Patents
- US126019742026Bake Strategies to Enhance Lithographic Performance of Metal-containing Resist
Lam Research Corporation
0 cites - US125851842026Photoresist with Multiple Patterning Radiation-absorbing Elements And/or Vertical Composition Gradient
Lam Research Corporation
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- US125046922025Cyclic Development of Metal Oxide Based Photoresist for Etch Stop Deterrence
Lam Research Corporation
0 cites - US124364642025Pre-exposure Photoresist Curing to Enhance EUV Lithographic Performance
Lam Research Corporation
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- US122781252025Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
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- US121836042024Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
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- US119214272024Methods for Making Hard Masks Useful in Next-generation Lithography
Lam Research Corporation
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