4 Patents
- US121129402024Method of Forming Topology-controlled Amorphous Carbon Polymer Film
ASM IP Holding B.V.
0 cites - US119729442024Method for Depositing a Gap-fill Layer by Plasma-assisted Deposition
ASM IP Holding B.V.
0 cites - US119231902024Method for Depositing Silicon-free Carbon-containing Film as Gap-fill Layer by Pulse Plasma-assisted Deposition
ASM IP Holding B.V.
0 cites - US116461972023Method for Depositing Silicon-free Carbon-containing Film as Gap-fill Layer by Pulse Plasma-assisted Deposition
ASM IP Holding B.V.
0 cites