Patents/Inventors

Timo Malinen

EspooFI5 patents

6 Patents

US123839232025
Atomic Layer Deposition with Plasma Source
Picosun Oy
0 cites
US123259152025
Substrate Processing Apparatus and Method
Picosun Oy
0 cites
US122975352025
Substrate Processing Methods and Apparatus
Picosun Oy
0 cites
US121105882024
Adjustable Fluid Inlet Assembly for a Substrate Processing Apparatus and Method
Picosun Oy
0 cites
US119707742024
Method of Operating a Deposition or Cleaning Apparatus
Picosun Oy
0 cites
US117252792023
Deposition or Cleaning Apparatus with Movable Structure
Picosun Oy
0 cites