Patents/Inventors

Timo Hatanpää

EspooFI16 patents

14 Patents

US125654662026
Synthesis and Use of Precursors for Vapor Deposition of Tungsten Containing Thin Films
ASM IP HOLDING B.V.
0 cites
US125097652025
Method and System for Depositing Transition Metal Carbide
ASM IP Holding B.V.
0 cites
US124420762025
Method and System for Depositing Noble Metal-containing Layer
ASM IP Holding B.V.
0 cites
US123659812025
Synthesis and Use of Precursors for ALD of Molybdenum or Tungsten Containing Thin Films
ASM IP Holding B.V.
0 cites
US122093052025
Deposition of Transition Metal—comprising Material
ASM IP Holding B.V.
0 cites
US121734022024
Method of Forming a Transition Metal Containing Film on a Substrate by a Cyclical Deposition Process, a Method for Supplying a Transition Metal Halide Compound to a Reaction Chamber, and Related Vapor Deposition Apparatus
ASM IP Holding B.V.
0 cites
US121042502024
Vapor Deposition Processes
ASM IP Holding B.V.
0 cites
US120657392024
Vapor Deposition Processes
ASM IP Holding B.V.
0 cites
US119591712024
Methods of Forming a Transition Metal Containing Film on a Substrate by a Cyclical Deposition Process
ASM IP Holding B.V.
0 cites
US119526582024
Cyclic Deposition Methods for Forming Metal-containing Material and Films and Structures Including the Metal-containing Material
ASM IP Holding B.V.
0 cites
US118147152023
Cyclic Deposition Methods for Forming Metal-containing Material and Films and Structures Including the Metal-containing Material
ASM IP Holding B.V.
0 cites
US116675952023
Synthesis and Use of Precursors for Vapor Deposition of Tungsten Containing Thin Films
ASM IP HOLDING B.V.
0 cites
US116241122023
Synthesis and Use of Precursors for ALD of Molybdenum or Tungsten Containing Thin Films
ASM IP HOLDING B.V.
0 cites
US115426002023
Synthesis and Use of Precursors for ALD of Group VA Element Containing Thin Films
ASM IP HOLDING B.V.
0 cites