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Inventors
Ties Wouter Van Der Woord
Eindhoven
NL
5 patents
6 Patents
US12436454
2025
Pellicle Membrane
ASML NETHERLANDS B.V.
0 cites
US12339588
2025
High Force Low Voltage Piezoelectric Micromirror Actuator
ASML Netherlands B.V.
0 cites
US12072620
2024
Method of Manufacturing a Membrane Assembly
ASML NETHERLANDS B.V.
0 cites
US11971654
2024
Metal-silicide-nitridation for Stress Reduction
ASML NETHERLANDS B.V.
0 cites
US11686997
2023
Metal-silicide-nitridation for Stress Reduction
ASML NETHERLANDS B.V.
0 cites
US11673169
2023
Membrane Cleaning Apparatus
ASML NETHERLANDS B.V.
0 cites