Patents/Inventors

Tien Fak Tan

Campbell, CAUS4 patents

5 Patents

US123409792025
Semiconductor Processing Chamber for Improved Precursor Flow
Applied Materials, Inc.
0 cites
US119159112024
Two Piece Electrode Assembly with Gap for Plasma Control
Applied Materials, Inc.
0 cites
US118347442023
Ceramic Showerheads with Conductive Electrodes
Applied Materials, Inc.
0 cites
US117354412023
Systems and Methods for Improved Semiconductor Etching and Component Protection
Applied Materials, Inc.
0 cites
US115916932023
Ceramic Showerheads with Conductive Electrodes
Applied Materials, Inc.
0 cites