Patents/Inventors

Tianhua Yu

Tracy, CAUS2 patents

3 Patents

US120778582024
Tungsten Deposition
Lam Research Corporation
0 cites
US120606392024
Rapid Flush Purging During Atomic Layer Deposition
Lam Research Corporation
0 cites
US119729522024
Atomic Layer Deposition on 3D NAND Structures
Lam Research Corporation
0 cites