Patents/Inventors

Thorsten Lill

Kalaheo, HIUS6 patents

7 Patents

US123027602025
Ion Beam Etching with Sidewall Cleaning
Lam Research Corporation
0 cites
US121274862024
Resistive Random Access Memory with Preformed Filaments
LAM RESEARCH CORPORATION
0 cites
US121069462024
Turbomolecular Pump and Cathode Assembly for Etching Reactor
Lam Research Corporation
0 cites
US120291332024
Ion Beam Etching with Sidewall Cleaning
Lam Research Corporation
0 cites
US118325332023
Conformal Damage-free Encapsulation of Chalcogenide Materials
Lam Research Corporation
0 cites
US117929872023
Self-aligned Vertical Integration of Three-terminal Memory Devices
LAM RESEARCH CORPORATION
0 cites
US116370222023
Electron Excitation Atomic Layer Etch
Lam Research Corporation
0 cites