Thorsten Bernd Lill

6 Patents

• US126159802026

  Etching of Indium Gallium Zinc Oxide

  Lam Research Corporation

  0 cites
• US125989292026

  Atomic Layer Etching of Molybdenum

  Lam Research Corporation

  0 cites
• US122800912025

  Etch Selectivity Control in Atomic Layer Etching

  Lam Research Corporation

  0 cites
• US122531902025

  Non-elastomeric, Non-polymeric, Non-metallic Membrane Valves for Semiconductor Processing Equipment

  Lam Research Corporation

  0 cites
• US120805922024

  Film Stack Simplification for High Aspect Ratio Patterning and Vertical Scaling

  Lam Research Corporation

  0 cites
• US117960852023

  Non-elastomeric, Non-polymeric, Non-metallic Membrane Valves for Semiconductor Processing Equipment

  Lam Research Corporation

  0 cites