Patents/Inventors

Thorsten Benter

HaanDE4 patents

4 Patents

US125736042026
Residual Gas Analyser, and EUV Lithography System Having a Residual Gas Analyser
CARL ZEISS SMT GmbH
0 cites
US122781002025
Holding Device for at Least One Filament and Mass Spectrometer
Leybold GmbH
0 cites
US121761992024
Ionization Device and Mass Spectrometer
Leybold GmbH
0 cites
US117911472023
Mass Spectrometer and Method for Analysing a Gas by Mass Spectrometry
Leybold GmbH
0 cites