Patents/Inventors

Thomas Theeuwes

VeldhovenNL13 patents

11 Patents

US126079422026
Metrology Methods and Apparatuses for Lithographic Performance Parameter Evaluation Using Probability Descriptions
ASML NETHERLANDS B.V.
0 cites
US125108282025
Method for Controlling a Manufacturing Process and Associated Apparatuses
ASML Netherlands B.V.
0 cites
US124682352025
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US123226602025
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US121425352024
Method and Apparatus to Determine a Patterning Process Parameter Using a Unit Cell Having Geometric Symmetry
ASML NETHERLANDS B.V.
0 cites
US120076972024
Method for Process Metrology
ASML NETHERLANDS B.V.
0 cites
US119472692024
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US117840982023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US117336062023
Method for Performing a Manufacturing Process and Associated Apparatuses
ASML NETHERLANDS B.V.
0 cites
US117282242023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites
US117106682023
Method and Apparatus to Determine a Patterning Process Parameter
ASML NETHERLANDS B.V.
0 cites