Thomas Patrick Duffey

6 Patents

• US125869782026

  Apparatus for and Method of Generating Multiple Laser Beams

  Cymer, LLC

  0 cites
• US123748532025

  Control System for a Plurality of Deep Ultraviolet Optical Oscillators

  Cymer, LLC

  0 cites
• US121693632024

  Radiation Source Testing

  Cymer, LLC

  0 cites
• US117772712023

  Method of and Apparatus for Extending Electrode Life in a Laser Chamber

  Cymer, LLC

  0 cites
• US117684382023

  Spectral Feature Selection and Pulse Timing Control of a Pulsed Light Beam

  Cymer, LLC

  0 cites
• US116869512023

  Reducing Speckle in an Excimer Light Source

  ASML Netherlands B.V.

  0 cites