16 Patents
- US124916032025Passive Acoustic Monitoring and Acoustic Sensors for Chemical Mechanical Polishing
Applied Materials, Inc.
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- US124475792025Chemical Mechanical Polishing Vibration Measurement Using Optical Sensor
Applied Materials, Inc.
0 cites - 0 cites
- US123438402025Control of Processing Parameters for Substrate Polishing with Substrate Precession
Applied Materials, Inc.
0 cites - 0 cites
- US120201592024Training Spectrum Generation for Machine Learning System for Spectrographic Monitoring
Applied Materials, Inc.
0 cites - US119318532024Control of Processing Parameters for Substrate Polishing with Angularly Distributed Zones Using Cost Function
Applied Materials, Inc.
0 cites - 0 cites
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- US117312382023Monitoring of Polishing Pad Texture in Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites - 0 cites
- US116995952023Imaging for Monitoring Thickness in a Substrate Cleaning System
Applied Materials, Inc.
0 cites - US116512072023Training Spectrum Generation for Machine Learning System for Spectrographic Monitoring
Applied Materials, Inc.
0 cites - 0 cites
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