22 Patents
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- US123126782025Methods for Depositing a Tungsten or Molybdenum Layer in the Presence of a Reducing Co-reactant
ENTEGRIS, Inc.
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- US122371702025Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt
ENTEGRIS, Inc.
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- US119878782024Chemical Vapor Deposition Processes Using Ruthenium Precursor and Reducing Gas
ENTEGRIS, Inc.
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- US118043752023Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt
ENTEGRIS, Inc.
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- US115606252023Vapor Deposition of Molybdenum Using a Bis(alkyl-arene) Molybdenum Precursor
ENTEGRIS, Inc.
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