Patents/Inventors

Thomas Augustus Mattaar

VeldhovenNL7 patents

3 Patents

US126186672026
Measurement Apparatus
ASML NETHERLANDS B.V.
0 cites
US124055422025
Method of Determining a Mark Measurement Sequence, Stage Apparatus and Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US118741032024
Measurement Apparatus
ASML NETHERLANDS B.V.
0 cites