13 Patents
- US124127592025Substrate Processing Apparatus, Reactor Mover for Moving a Reactor of the Apparatus and Method of Maintaining the Reactor of the Apparatus
ASM IP Holding B.V.
0 cites - US123664102025Apparatus for Processing a Plurality of Substrates Provided with an Extractor Chamber
ASM IP Holding B.V.
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- US122031662025Apparatus and Methods for Performing an In-situ Etch of Reaction Chambers with Fluorine-based Radicals
ASM IP Holding B.V.
0 cites - US120778542024Chemical Vapor Deposition Furnace with a Cleaning Gas System to Provide a Cleaning Gas
ASM IP Holding B.V.
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- US119712172024Batch Furnace Assembly and Method of Operating a Batch Furnace Assembly
ASM IP Holding B.V.
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