Patents/Inventors

Theodoros Panagopoulos

Los Gatos, CAUS1 patent

2 Patents

US122531902025
Non-elastomeric, Non-polymeric, Non-metallic Membrane Valves for Semiconductor Processing Equipment
Lam Research Corporation
0 cites
US117960852023
Non-elastomeric, Non-polymeric, Non-metallic Membrane Valves for Semiconductor Processing Equipment
Lam Research Corporation
0 cites