17 Patents
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- US124380052025Low Temperature Selective Etching of Silicon Nitride Using Microwave Plasma
Applied Materials, Inc.
0 cites - US123409782025Symmetric and Irregular Shaped Plasmas Using Modular Microwave Sources
Applied Materials, Inc.
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- US123004972025Method and Apparatus of Low Temperature Plasma Enhanced Chemical Vapor Deposition of Graphene
Applied Materials, Inc.
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- US121911182025Monolithic Modular Microwave Source with Integrated Process Gas Distribution
Applied Materials, Inc.
0 cites - US121440902024Monolithic Modular Microwave Source with Integrated Temperature Control
Applied Materials, Inc.
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- US118813842024Monolithic Modular Microwave Source with Integrated Process Gas Distribution
Applied Materials, Inc.
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- US115642922023Monolithic Modular Microwave Source with Integrated Temperature Control
Applied Materials, Inc.
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