Patents/Inventors

Thaddeus Gerard Dziura

San Jose, CAUS2 patents

3 Patents

US124808932025
Optical and X-ray Metrology Methods for Patterned Semiconductor Structures with Randomness
KLA Corporation
0 cites
US123207632025
Full Beam Metrology for X-ray Scatterometry Systems
KLA Corporation
0 cites
US119553912024
Process Monitoring of Deep Structures with X-ray Scatterometry
Kla-tencor Corporation
0 cites