Patents/Inventors

Tetsuya Sakazaki

KumamotoJP3 patents

4 Patents

US123717962025
Substrate Processing Apparatus, Substrate Processing Method, and Chemical Liquid
TOKYO ELECTRON LIMITED
0 cites
US122030212025
Substrate Processing Device and Etching Liquid
TOKYO ELECTRON LIMITED
0 cites
US119159412024
Dynamically Adjusted Purge Timing in Wet Atomic Layer Etching
Tokyo Electron Limited
0 cites
US115453672023
Substrate Processing Apparatus, Substrate Processing Method, and Chemical Liquid
TOKYO ELECTRON LIMITED
0 cites