Patents/Inventors

Tetsuya Miyashita

NirasakiJP14 patents

13 Patents

US125598352026
Film Forming Apparatus and Film Forming Method
TOKYO ELECTRON LIMITED
0 cites
US124697232025
Substrate Processing Apparatus and Abnormality Detection Method
Tokyo Electron Limited
0 cites
US123277442025
Substrate Transfer Device and Substrate Processing System
Tokyo Electron Limited
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US122610782025
Processing Method and Processing Apparatus
Tokyo Electron Limited
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US122117202025
Vacuum Transfer Device, Substrate Processing System, and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US121702172024
Substrate Processing Apparatus and Abnormality Detection Method
Tokyo Electron Limited
0 cites
US121632152024
Film Forming Apparatus and Film Forming Method
TOKYO ELECTRON LIMITED
0 cites
US120338782024
Substrate Transfer Apparatus and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US120026672024
Sputtering Apparatus and Method of Controlling Sputtering Apparatus
Tokyo Electron Limited
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US119011662024
Magnetron Sputtering Apparatus and Magnetron Sputtering Method
Tokyo Electron Limited
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US118238792023
Film Formation Apparatus and Film Formation Method
Tokyo Electron Limited
0 cites
US117640922023
Substrate Transfer Apparatus and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US115425922023
Film Forming System and Method for Forming Film on Substrate
TOKYO ELECTRON LIMITED
0 cites