Patents/Inventors

Tetsuya Kosugi

ToyamaJP7 patents

7 Patents

US124615072025
Substrate Processing Apparatus, Substrate Processing Method, Semiconductor Device Manufacturing Method, and Control Program
KOKUSAI ELECTRIC CORPORATION
0 cites
US122939302025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater
Kokusai Electric Corporation
0 cites
US122411592025
Substrate Processing Apparatus and Ceiling Heater
Kokusai Electric Corporation
0 cites
US120853382024
Heater, Temperature Control System, and Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites
US120501382024
Substrate Processing Apparatus, and Thermocouple
KOKUSAI ELECTRIC CORPORATION
0 cites
USD09801772023
Ceiling Heater for Substrate Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites
USD09761292023
Temperature Sensor
KOKUSAI ELECTRIC CORPORATION
0 cites